JPS63127974U - - Google Patents
Info
- Publication number
- JPS63127974U JPS63127974U JP1959287U JP1959287U JPS63127974U JP S63127974 U JPS63127974 U JP S63127974U JP 1959287 U JP1959287 U JP 1959287U JP 1959287 U JP1959287 U JP 1959287U JP S63127974 U JPS63127974 U JP S63127974U
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor wafer
- metal plate
- shaped jig
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 4
- 239000010419 fine particle Substances 0.000 claims description 2
- 239000011888 foil Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1959287U JPS63127974U (en]) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1959287U JPS63127974U (en]) | 1987-02-12 | 1987-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127974U true JPS63127974U (en]) | 1988-08-22 |
Family
ID=30814326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1959287U Pending JPS63127974U (en]) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127974U (en]) |
-
1987
- 1987-02-12 JP JP1959287U patent/JPS63127974U/ja active Pending